Analytical analysis of a circular PZT actuator for valveless micropumps

Closed form analytical equations are important tools for predicting and optimizing the behavior of a piezoelectric microactuator for micropump applications. However, there is no reliable analytical solution to date to analyze the behavior of a circular piezoelectric microactuator for a valveless micropump. In this paper, a linear strain distribution is assumed across the thickness of the passive plate of the lead zirconate titanate (PZT) actuator given that the mechanical properties such as Young’s modulus and Poisson ratio of the actuator and the passive plate are close. An analytical equation for the passive plate deflection is derived upon this assumption. The analytical result shows excellent agreement with experimental data as well as the results from finite element simulation. Based on this analytical model, the effects of several important parameters and nondimensional variable groups on the actuator performance have been investigated. These parameters and variables include the dimensions and mechanical properties of the PZT disk, the passive plate, and the bonding layer material. # 2003 Elsevier Science B.V. All rights reserved.